If you consider that the structural width of an electronic conductor on a microchip is around 30–250 nanometres – for comparison, a human hair is around 300 times as thick – you get an idea of just how strict the requirements on clean room technology and associated filter systems are.
As high-efficiency particulate filters for the separation of the smallest particles in clean room systems, HEPA and ULPA filters are used. They ensure a particularly high level of air cleanliness and can separate even submicrometre germs and particles.
Filters are supposed to separate particles in the air – and they are an obstacle to the airflow. As the differential pressure increases, the energy efficiency decreases. The goal is minimising the loss.
TROX has therefore developed air filters that reduce the inevitable increase in the pressure difference and thus reduce the system resistance.
TROX offers filter media with extremely fine pleats and aerodynamically optimised filter units that help to save up to 50 % energy in comparison with conventional filters. reimbursed.
TROX produces a low-outgassing clean room filter With certified safety for the highest quality production reliability in clean rooms e.g. in the semiconductor industry.
All our clean room filters are classified according to the particle counting method pursuant to EN 1822. However, for certain specific applications, e.g., in the semiconductor industry, it is not enough to know the number of particles, but also the composition of the particles.
The Fraunhofer Institute has certified the outgassing behaviour of the TROX filter of the MFPCR type according to ISO 14644-5.
Filtry TROX do pomieszczeń czystych na stanowisku testowym do skanowania filtrów z najnowszą technologią liczenia cząstek
as high-efficiency particulate filters for the separation of suspended particles in clean room systems, HEPA and ULPA filters are used.
On the new filter scan test rig, filters of filter classes H13, H14, U15, U16 and U17 are tested under clean room conditions.
Describe your specific needs to us or arrange a non-binding consultation.
Contact your TROX Specification Sales Team
Mr Alan Cansell (Key Client Director) and Mr Steve Law (Sales Director)
E-Mail: consult@troxuk.co.uk
Phone: +44 (0)1842 754545
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